This influence on the speed of an ion is known as the " Asymmetry effect " because the ionic atmosphere moving around the ion is not symmetrical; the charge density behind is greater than in the front, slowing the motion of the ion.
2.
"' Asymmetry effects leading to lack of simultaneous focus for two bars . "'The off-axis nature of the optics coupled with the shadowing effects of the EUV mask lead to the inability of two adjacent identical features to be in focus.
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