Equipment that can be included in the main scattering chamber includes a LEED screen ( to make complimentary measurements of the surface structure ), an Auger analysis system ( to determine the contamination level of the surface ), a mass spectrometer ( to monitor the vacuum quality and residual gas composition ), and, for working with metal surfaces, an ion gun ( for sputter cleaning of the sample surface ).
12.
A secondary ion mass spectrometer consists of ( 1 ) a primary ion gun generating the primary ion beam, ( 2 ) a primary ion column, accelerating and focusing the beam onto the sample ( and in some devices an opportunity to separate the primary ion species by Wien filter or to pulse the beam ), ( 3 ) high vacuum sample chamber holding the sample and the secondary ion extraction lens, ( 4 ) a mass analyser separating the ions according to their mass to charge ratio, and ( 5 ) a detector.
